| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a gas sensor capable of attaining stable electric contact continuity with an external lead wire, and a method of manufacturing the gas sensor. <P>SOLUTION: A contact part 61 of an electrode metal 60 provided in the gas sensor 1 attains the electric contact continuity, by contacting with a plurality of via conductors 15 provided projectedly respectively from both faces in a rear end side of a sensor element 10. The via conductors 15 is prevented from being damaged by contact with the contact part 61 of the electrode metal 60, since a Vickers hardness of the via conductor 15 is regulated to 180(Hv) or more. A projection height of the via conductor 15 projected from a plate face of the sensor element 10 is regulated 30μm or more to prevent the contact part 61 from contacting with the plate face of the sensor element 10 (a detecting element 12 side or a plate face of a heater element 14), even when the contact part 61 of the electrode metal 60 is deflected to a sensor element 10 side. <P>COPYRIGHT: (C)2007,JPO&INPIT |
