| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a surface inspection instrument for identifying, with high accuracy, the category of a defect in a light penetrating substrate having a semi transparent film on the surface thereof when the surface inspection is done. SOLUTION: In this surface inspection instrument, a first detection means 2a, 2b outputs a detective signal by finding the reflected light of a light-beam corresponding to the defect on the surface of the frontal side of the light- penetrating substrate having the semi-transparent film. A second detection means 3a, 3b outputs a detective signal by finding a transmission light of the beam corresponding to the defect on the surface of the opposite side of the above substrate. In an identifying means 8 thereof, a reference function is established to define the correlation between a level of each detective signal obtained by the first and the second means, respectively, such a level of which (each detective signal) is compared by using the reference function as a comparison standard, and, then, the identifying means identifies which of all the plurality of categories the from category to category varying defect present in the substrate's surface falls under, based upon the comparison results.</p> |
