发明名称 |
INTEGRATED CIRCUIT WITH INTEGRATED CAPACITOR |
摘要 |
An explanation is given of, inter alia, a circuit arrangement in which an intermediate layer (160) made of a dielectric material is arranged between two metal layers (102 and 104). The intermediate layer (160) is designed in such a way that the capacitance per unit area between the connection layers (102, 104) is greater than 0.5 fF/μm2. |
申请公布号 |
EP1500140(B1) |
申请公布日期 |
2010.06.30 |
申请号 |
EP20030722222 |
申请日期 |
2003.03.17 |
申请人 |
INFINEON TECHNOLOGIES AG |
发明人 |
BARTH, HANS-JOACHIM;HOLZ, JUERGEN |
分类号 |
H01L21/768;H01L23/522;H01L21/822;H01L27/04 |
主分类号 |
H01L21/768 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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