发明名称 INTEGRATED CIRCUIT WITH INTEGRATED CAPACITOR
摘要 An explanation is given of, inter alia, a circuit arrangement in which an intermediate layer (160) made of a dielectric material is arranged between two metal layers (102 and 104). The intermediate layer (160) is designed in such a way that the capacitance per unit area between the connection layers (102, 104) is greater than 0.5 fF/μm2.
申请公布号 EP1500140(B1) 申请公布日期 2010.06.30
申请号 EP20030722222 申请日期 2003.03.17
申请人 INFINEON TECHNOLOGIES AG 发明人 BARTH, HANS-JOACHIM;HOLZ, JUERGEN
分类号 H01L21/768;H01L23/522;H01L21/822;H01L27/04 主分类号 H01L21/768
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