| 摘要 |
The spiral spring (1) (or other functional component) is made from a raw material selected from: semiconductor, glass, ceramic, silicon carbide, silicon nitride, zirconium oxide and/or diamond. Silicon is used in crystalline- or single-crystal form. It is a silicon wafer. The material is polycrystalline silicon. It is silicon obtained by epitaxial deposition. The spiral spring is polycrystalline silicon deposited by epitaxy on a substrate provided with a barrier layer. The substrate is silicon with a barrier layer of silicon oxide. When glass is used, it is a silicate glass, e.g. borosilicate glass or aluminoborosilicate glass. The material is flat or plate-like and is wound (2) up into a spiral. The material is single-crystal or polycrystalline diamond. It is crystalline-, single crystal- or polycrystalline silicon carbide or silicon nitride. The material is an aluminum ceramic, e.g. an aluminum oxide-, aluminum nitride- or aluminum carbide ceramic. It is a silicon ceramic, e.g. silicon nitride ceramic. The material is germanium. The functional component is made from the material by cutting out and/or etching. It is cut from the material by laser. It is optionally treated with a water jet at the same time. A diamond coating is added by chemical vapor deposition. A surface coating of silicon oxide, silicon dioxide, silicon nitride, silicon carbide and/or diamond-like carbon is provided. The functional component is made in a single piece with other functional components, e.g. with a roller (3) or fastening section (4) for attachment to a plate, circuit board or adjuster on the board. The functional component undergoes further treatment in an etching solution. This is e.g. an alkaline solution and/or a hydrofluoric acid/nitric acid mixture. The functional component is a spiral spring, balance wheel, escapement wheel or escape lever. The maximum diameter of the spiral spring is 4-10 mm and its height is preferably 0.07-0.16 mm. Using diamond or ceramic, the heights are about 0.07 mm and 0.12 mm respectively. The winding clearance of the spiral spring is at least 0.05-0.3 mm. The spiral spring winding has a rectangular cross section of about 0.025 mm x 0.07 mm. Further details of the component are described, in accordance with the foregoing principles. An independent claim IS INCLUDED FOR the component so produced. |
