发明名称
摘要 A piezoelectric element includes: a base substrate; a lower electrode provided above the base substrate; a lower dummy electrode provided on the base substrate and electrically insulated from the lower electrode; a piezoelectric layer provided on the base substrate, the lower electrode and the lower dummy electrode; and an upper electrode provided on the piezoelectric layer.
申请公布号 JP4492821(B2) 申请公布日期 2010.06.30
申请号 JP20070063306 申请日期 2007.03.13
申请人 发明人
分类号 H01L41/09;H01L41/18;H01L41/22;H01L41/318;H01L41/39 主分类号 H01L41/09
代理机构 代理人
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