发明名称
摘要 An adhesive layer (4) is formed between a piezoelectric element (3) and a baseboard (2) by using an adhesive agent with a Shore D hardness of 80 HS or greater to couple the baseboard (2) and the piezoelectric element (3). The adhesive layer (4) is formed in a uniform thickness by placing two spacers on a transfer sheet and spreading the adhesive agent between these spacers. The baseboard (2) and the piezoelectric element (3) bonded together by the adhesive layer (4) are heated in a pressed state to cause the adhesive layer (4) to harden. The vibration loss in the adhesive layer (4) can be reduced because the hardened adhesive layer (4) has high hardness. In addition, variation in the vibration characteristics of a piezoelectric actuator (1) can be reduced because the thickness of the adhesive layer (4) is uniform. <IMAGE>
申请公布号 JP4492349(B2) 申请公布日期 2010.06.30
申请号 JP20040551203 申请日期 2003.11.07
申请人 发明人
分类号 H01L41/09;B06B1/06;G10K9/122;H01L41/18;H01L41/187;H01L41/22;H01L41/313;H02N2/08;H02N2/16 主分类号 H01L41/09
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