| 发明名称 |
METHOD AND APPARATUS FOR THE PRODUCTION OF HIGH PURITY TUNGSTEN HEXAFLUORIDE |
| 摘要 |
The present Invention provides new and useful apparatus and methods for purifying WF6 gas, and In particular, provides apparatus and methods of using carbonaceous materials to produce high purity WF6by removing substantially all the high volatility gas impurities and troublesome transition metal impurities The present invention is particularly useful for removing chromium and molybdenum impurities from WF6 gas.
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| 申请公布号 |
KR20100072235(A) |
申请公布日期 |
2010.06.30 |
| 申请号 |
KR20107007456 |
申请日期 |
2008.08.05 |
| 申请人 |
LINDE NORTH AMERICA, INC. |
发明人 |
HOGLE RICHARD ALLEN;MA CE;PRECOURT DENNIS;WITHLOCK WALTER HUGH;SATCHELL DONALD PRENTICE JR. |
| 分类号 |
C01G41/04;B01D53/047 |
主分类号 |
C01G41/04 |
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