摘要 |
A piezoelectric element (120a) is secured to a dust filter (119) as a dust-screening member which is shaped like a plate as a whole and has at least one side that is symmetric with respect to a symmetry axis, the piezoelectric element being driven to produce vibration Z (x, y) at the dust filter, the vibration being expressed as follows: Z x �¢ y = W mn x �¢ y ‹ cos ³ + W nm x �¢ y ‹ sin ³
where Z (x, y) is vibration at a given point P (x, y) on the dust filter, m and n are positive integers including 0, indicating the order of natural vibration corresponding to a vibrational mode, W mn x �¢ y = sin n �¢ À ‹ x + À 2 ‹ sin m �¢ À ‹ y + À 2 , W nm x �¢ y = sin m �¢ À ‹ x + À 2 ‹ sin n �¢ À ‹ y + À 2 , and
³ is +À/4 or ranges from -À/8 to -À/4. The dust filter is shaped such that the ratio of length of either short side to either long side of a virtual rectangle (175) is 0.9 or more, but less than 1, the virtual rectangle having the same area as the dust filter and having sides including the one side which the dust filter has. |