Laser processing apparatus and method for manufacturing thin-film solar cells

摘要

A laser processing apparatus which achieves both shorter Turn Around Time (TAT) and reduction in processing defects. In the apparatus, a laser radiation section (4,5,6), an undulation measurement section (11,12) for measuring undulation of a substrate or a film thickness measuring section for measuring the thickness of a thin film formed on the substrate, and an optical inspection section (10) for optically inspecting grooves formed by laser-processing the thin film on the substrate are fixed so that their positional relationship is kept constant.