发明名称 METHOD FOR FILLING METAL INTO FINE SPACE
摘要 <p>The present invention includes a step of cooling a molten metal within a fine space (21) present in the inside of an object (2) and hardening it while applying an external force for pressurizing the object (2) set on a support member (3) and the molten metal (41) within the fine space (21). The external force is given by at least one member selected among a pressing pressure, an injection pressure, a rolling compaction and a gass pressure.</p>
申请公布号 KR100967019(B1) 申请公布日期 2010.06.30
申请号 KR20090044991 申请日期 2009.05.22
申请人 发明人
分类号 H01L21/208;H01L21/288 主分类号 H01L21/208
代理机构 代理人
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