| 摘要 |
PURPOSE: A waste liquid processing device and a method thereof are provided to reduce processing costs of waste liquid while improving recycling efficiency of the waste liquid by separating and discharging the waste liquid which is recyclable or not. CONSTITUTION: A waste liquid processing device comprises the following: a waste liquid collecting tank(20) connected to a process chamber(10) of a substrate manufacturing device by a collecting line(22); a conductivity value measuring device(30) measuring a conductivity value of waste liquid in the collecting tank; a first discharge pipe(42) discharging recyclable waste liquid; a second discharge pipe(44) discharging waste liquid to be abandoned; a drain line(40) discharging the waste liquid; a separating device(50) installed on a branch pipe of the discharge pipe; and a controller(60) controlling the separating device. |
