| 发明名称 |
Polymers, methods of use thereof, and methods of decomposition thereof |
| 摘要 |
Polymers, methods of use thereof, and methods of decomposition thereof, are provided. One exemplary polymer, among others, includes, a photodefinable polymer having a sacrificial polymer and a photoinitiator.
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| 申请公布号 |
US7745100(B2) |
申请公布日期 |
2010.06.29 |
| 申请号 |
US20060451144 |
申请日期 |
2006.06.12 |
| 申请人 |
GEORGIA TECH RESEARCH CORPORATION |
发明人 |
KOHL PAUL A.;ALLEN SUEANN BIDSTRUP;WU XIAOQUN;HENDERSON CLIFFORD LEE |
| 分类号 |
G03F7/20;B81C1/00;C08J3/28;C08K5/00;G03F7/30;G03F7/36;G03F7/38;G03F7/40 |
主分类号 |
G03F7/20 |
| 代理机构 |
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代理人 |
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| 主权项 |
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