ELIMINATING POLY UNI-DIRECTION LINE-END SHORTENING USING SECOND CUT

摘要

PURPOSE: A method for eliminating poly unidirectional line-end shortening by using a second cutting process is provided to remove an irregular gate strip by performing a second cutting process on a gate electrode strip. CONSTITUTION: A substrate(10) comprises a first active region(40) and a second active region(42). A gate dielectric layer(26) is formed on the substrate and the active region. A gate electrode layer(28) is formed on a gate dielectric layer. The gate electrode layer and the gate dielectric layer are patterned to form the gate electrode strip. The gate electrode strip is formed on the active region.