THE PROCESS CHAMBER PROTECTIVE SYSTEM OF A SINGLE CRYSTAL SILICON INGOT GROWER

摘要

PURPOSE: A process chamber protective system of a single crystal silicon ingot grower is provided to cool down from the bottom to the top a process bath by forming a guide line for cooling water in an upper part of the process bath. CONSTITUTION: A process outer container(100) is separated from an process internal bath(110) outwardly. A process bath upper plate(130) is included in top of the process internal bath and the process outer container. A cooling water inlet(114) intakes a cooling water form a lower space of the process outer container. A cooling water outlet(115) discharges the cooling water from an upper space of the process outer container. The cooling guide line(120) forms a cross- sectional area for the cooling water.