PROCESS AND METHOD FOR MODIFYING POLYMER FILM SURFACE INTERACTION

摘要

PURPOSE: A process and a method for modifying a polymer film surface interaction are provided to obtain high reproduction accuracy by supplying the materials with light reactive compounds including a chemical functional group. CONSTITUTION: A mold(10) has a patterned surface(9) with a concave or convex part. An anti-adhesion layer(8) is contacted with the surface(6) of a sample(1). A resist(5) fills gaps of the patterned surface. The mold is separated from a polymer replica(11) and then an embossed image remains on the surface of a polymer layer(12). A thin organic layer(17) acting as an attachment enhancer is interposed between a substrate surface(16) and a resist(18).