| 摘要 |
This lens evaluation device comprises a plurality of point light sources arranged on the plane, an imaging unit for picking up an object and obtaining its image, a movement unit for changing the relative distance between the point light source or the imaging unit and the optical system to be evaluated, a storage medium for recording stack images obtained by the imaging unit picking up the images of the plurality of point light sources via the optical system every time the movement unit changes the relative distance, an image position calculation unit for calculating a plurality of image positions from the plurality of pieces of point light source image in the stack image recorded on the storage medium and an aberration acquisition unit for fitting an aberration model function to the plurality of image positions calculated and obtaining an aberration measurement value.
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