发明名称 SILICON SINGLE CRYSTAL COOLER AND SILICON SINGLE CRYSTAL GROWTH APPARATUS HAVING THE SAME
摘要 PURPOSE: A silicon single crystal cooling device and a silicon single crystal growing device including the same are provided to reduce manufacturing costs and improve productivity by increasing the filling quantity of the poly crystal silicon by moving a cooling pipe. CONSTITUTION: A chamber(110) provides a space for growing a single crystal ingot. A crucible(120) is included in the inside of a chamber in order to contain the silicon solution. A heater(130) heats the crucible. A raising unit(140) raises the cable by winding a cable(141). A silicon single crystal cooling device(150) cools the silicon single crystal ingot. The silicon poly crystal cooling device includes a cooling pipe(151) and a cooling pipe lifting unit(153).
申请公布号 KR20100071526(A) 申请公布日期 2010.06.29
申请号 KR20080130271 申请日期 2008.12.19
申请人 SILTRON INC. 发明人 KIM, DAE YEON;CHO, HYON JONG;SIM, BOK CHEOL
分类号 C30B15/22;C30B15/24 主分类号 C30B15/22
代理机构 代理人
主权项
地址