发明名称 |
SILICON SINGLE CRYSTAL COOLER AND SILICON SINGLE CRYSTAL GROWTH APPARATUS HAVING THE SAME |
摘要 |
PURPOSE: A silicon single crystal cooling device and a silicon single crystal growing device including the same are provided to reduce manufacturing costs and improve productivity by increasing the filling quantity of the poly crystal silicon by moving a cooling pipe. CONSTITUTION: A chamber(110) provides a space for growing a single crystal ingot. A crucible(120) is included in the inside of a chamber in order to contain the silicon solution. A heater(130) heats the crucible. A raising unit(140) raises the cable by winding a cable(141). A silicon single crystal cooling device(150) cools the silicon single crystal ingot. The silicon poly crystal cooling device includes a cooling pipe(151) and a cooling pipe lifting unit(153).
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申请公布号 |
KR20100071526(A) |
申请公布日期 |
2010.06.29 |
申请号 |
KR20080130271 |
申请日期 |
2008.12.19 |
申请人 |
SILTRON INC. |
发明人 |
KIM, DAE YEON;CHO, HYON JONG;SIM, BOK CHEOL |
分类号 |
C30B15/22;C30B15/24 |
主分类号 |
C30B15/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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