METHOD FOR FORMING SEMICONDUCTOR OXIDE NANOFIBERS OF SENSORS, AND GAS SENSORS USING THE SAME

摘要

PURPOSE: An oxide semiconductor nanofiber manufacturing method for a sensor and a gas sensor using the same are provided to cancel a large variation of electric resistance due to reaction gas suction and oxidation/reduction reaction on the oxide surface. CONSTITUTION: An oxide semiconductor nanofiber manufacturing method for a sensor is as follows. Oxide semiconductor/polymer composite solution is manufactured. The oxide semiconductor/polymer composite solution is applied on a substrate. The substrate on which the oxide semiconductor/polymer composite solution is applied is thermally treated. The step of manufacturing the oxide semiconductor/polymer composite solution is as follows. The oxide semiconductor Lan+1NinO3n+ 1(n=1,2,3) nanofiber is formed. A metal oxide precursor, polymer, and solvent are taken and mixed with a predetermined weight and a volume ratio. The mixed material is stirred above a room temperature to manufacture the oxide semiconductor/polymer composite solution.