| 摘要 |
PURPOSE: An apparatus for coating a thin film is provided to prevent pulsation when a chemical liquid is injected, to minutely control the amount of the chemical liquid which is injected into a slit die, and to more accurately and precisely inject a fixed amount of the chemical liquid. CONSTITUTION: An apparatus(1) for coating a thin film comprises a slit die(10) spraying a chemical liquid on an object and a chemical liquid supply unit(100) for supplying the chemical liquid to the slit die. The chemical liquid supply unit includes a chemical liquid storage tank(110) and a chemical liquid injection chamber(130) including a tube assembly(140). The tube assembly includes an elastic wrinkle tube(141) which is filled with the chemical liquid which is transferred from the chemical liquid storage tank. |
