发明名称 A BOARD HAVING LAYER FOR PREVENTING HUMIDITY
摘要 PURPOSE: A board having layer for preventing humidity is provided to reduce the permeability of vapor and oxide by forming a film preventing humidity through a plasma enhanced chemical vapor deposition. CONSTITUTION: A transparent base material(120) is formed with a polymer. A film preventing humidity is formed on the top side of the transparency base material. The film comprises a silicon organic compounds thin film(142) and a silicon inorganic compound(144). The silicon organic compounds thin film is deposited on the one side of the transparent base material by thickness of 3~10mm through plasma chemical vapor deposition. The silicon inorganic compound is formed on the one side of the silicon organic compounds thin film in order to have the thickness less than 1000nm thorough PECVD(Plasma-Enhanced Chemical Vapor Deposition). The silicon organic compounds thin film and silicon inorganic compound thin film are successively formed.
申请公布号 KR100965847(B1) 申请公布日期 2010.06.28
申请号 KR20090081612 申请日期 2009.08.31
申请人 KOREA INSTITUTE OF MACHINERY & MATERIALS 发明人 LEE, GUN HWAN;YOON, JUNG HEUM;LEE, SUNG HOON;JEONG, YU JEONG
分类号 H01L21/205;G02F1/1339 主分类号 H01L21/205
代理机构 代理人
主权项
地址