| 摘要 |
FIELD: electricity. ^ SUBSTANCE: method of semiconductor structure formation involves cultivation of epitaxial layer on original plate using source plate in the mode of chemical semiconductor transfer in halogen-containing hydrogen medium from plates to adjoining plates over a gap at minimum reactant flow or in still medium. ^ EFFECT: reduced cost of epitaxial structure manufacturing for integral schemes, discrete instruments, including solar cells. ^ 3 cl, 4 dwg |
