Organic silver complexes, their preparation methods and their methods for forming thin layers

摘要

Disclosed is a silver complex obtained by reacting at least one silver compound of the formula AgnX with at least one ammonium carbamate or ammonium carbonate compound of the pictured formulas, wherein n is 1-4 and wherein the other variables are as defined in the specification. Also disclosed is a method for forming a metal film or a metal oxide film by forming a thin film using the above silver complex, and performing oxidation, reduction, heat treatment, chemical vapor deposition, plasma vapour deposition, sputtering, electroplating, lithography, IR, electron beam or laser treatment.