A POWER SUPPLY FOR AN ION IMPLANTER

摘要

PURPOSE: A power supply for an ion implanter is provided to directly supply power to a power supply module by arranging a charge module outside a high voltage terminal. CONSTITUTION: A power supply for an ion implanter includes a fuel cell(200) and a fuel supply module(300). The fuel cell is arranged inside a high voltage terminal(100). The fuel cell supplies the power to the ion implanter module. A fuel supply module is arranged outside a high voltage terminal. A fuel supply module supplies the fuel to the fuel cell through an insulation hose(400). An insulation hose is made of plastic or ceramic materials. The fuel cell is a hydrogen fuel cell.