| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laser crystallization device such that unevenness of irradiation power is eliminated by reducing increases in light device area and device weight and eliminating a shift in light condensation position of laser light. Ž<P>SOLUTION: A substrate is scanned with laser light in two dimensions through two movements which is a movement of the substrate and a movement of an optical system, and while the movement of the substrate is made through a continuous scan movement in a scanning direction (for example, in an X direction) of the substrate, the movement of the optical system is made through an intermittent stepped movement in a direction (for example, in a Y direction) perpendicular to the scanning direction. Thus, the scanning with the laser light includes two operations, i.e. a scanning operation and a stepping operation and then a stage for conveying the substrate is moved in one scanning direction (for example, in the X direction), so a movement range based upon the movement of the stage is reducible to about a half as compared with a configuration for moving the stage in two scanning directions of the X direction and Y direction. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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