| 摘要 |
PROBLEM TO BE SOLVED: To prevent breakage of an object to be processed even when abnormality such as an open cell occurs in a plate-like workpiece formed from a lamination structure of the object to be processed and protective tape in grinding the plate-like workpiece. SOLUTION: The grinding machine includes an image pickup part 14a for picking up the plate-like work 100, and is provided with: an abnormality detection means 14 of detecting abnormality in a plate-like workpiece 100. When the abnormality detection means 14 detects abnormality such as an open cell 105 in the plate-like workpiece 100 formed from the lamination structure of the object 101 to be processed and the protective tape 102, countermeasures of stopping feeding of the plate-like workpiece 100 for retention means. COPYRIGHT: (C)2010,JPO&INPIT |
