| 发明名称 |
CERAMIC SUBSTRATE AND METHOD OF MANUFACTURING THE SAME |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a ceramic substrate that facilitates detection of a scratch on a surface, and to provide a method of manufacturing the ceramic substrate. <P>SOLUTION: On the surface of a base material substrate 11 formed by sintering ceramic, a thin film layer 12 for scratch detection is formed to a film thickness smaller than an allowable limit depth of a scratch by sintering fine particles of ceramic of the same quality with the base material substrate 11 which are smaller than ceramic particles of the base material substrate 11, and the fine particles have an average particle size of 0.5 to 3 μm while the ceramic particles of the base material substrate 11 have an average particle size of 10 to 100 μn. <P>COPYRIGHT: (C)2010,JPO&INPIT |
| 申请公布号 |
JP2010141056(A) |
申请公布日期 |
2010.06.24 |
| 申请号 |
JP20080315001 |
申请日期 |
2008.12.10 |
| 申请人 |
MITSUBISHI MATERIALS CORP |
发明人 |
AOKI SHINSUKE;NAGASE TOSHIYUKI |
| 分类号 |
H01L23/13;H01L23/12;H01L23/15;H05K3/46 |
主分类号 |
H01L23/13 |
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