| 摘要 |
PROBLEM TO BE SOLVED: To provide a processing facility having a stacker crane for safely carrying a carrying vessel by restraining reduction in carrying efficiency when failure is not caused, by preliminarily functioning when the stacker crane causes failure, in a factory having a plurality of process chambers for successively processing a processing object in the carrying vessel, and the stacker crane for carrying the carrying vessel between these process chambers. SOLUTION: Tracks 31 of the stacker cranes 2a and 2b are laid in close vicinity by two in parallel to rows between the process chambers 21 of the mutually oppositely juxtaposed two rows, and a delivery mechanism 61 for delivering the carrying vessel between the mutual stacker cranes 2a and 2b, is arranged on one end side of a carrying passage of these stacker cranes 2a and 2b. When the failure is not caused, the two stacker cranes 2a and 2b carry the carrying vessel to the rows of the process chambers 21 on the respective approached side, and when one causes the failure, the other preliminarily carries the carrying vessel by crossing the one track 31. COPYRIGHT: (C)2010,JPO&INPIT
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