发明名称 BLASTING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a blasting device capable of preventing blasting of aggregated particles and stably blasting solid fine particles. SOLUTION: The blasting device includes: a supply nozzle 22 for blasting solid fine particles from an outlet opening 22a; an acceleration nozzle 25 arranged at the same axis while a base end side covers an outer side of the outlet opening and a tip and side is extended at a downstream side rather than the supply nozzle 22; an acceleration gas supply unit 40 for blasting the acceleration gas from an acceleration gas blasting port 26 to accelerate the solid fine particles and blasting them from a blasting port 25a; and a barrier member 28 arranged inside the acceleration nozzle 25 by facing the outlet opening 22a. The solid fine particles G blasted from the outlet opening 22a into the acceleration nozzle are crushed by colliding with the barrier member 28, and are blasted from the blasting port 25a to a target W to be processed by being energized by the acceleration gas. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010137341(A) 申请公布日期 2010.06.24
申请号 JP20080317478 申请日期 2008.12.12
申请人 NIKON CORP 发明人 SHIBUYA TOSHIHIKO;KURIYAGAWA TSUNEMOTO
分类号 B24C5/04 主分类号 B24C5/04
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