发明名称 |
SURFACE ACOUSTIC WAVE BASED MICRO-SENSOR APPARATUS AND METHOD FOR SIMULTANEOUSLY MONITORING MULTIPLE CONDITIONS |
摘要 |
A SAW-based micro-sensor apparatus for simultaneously monitoring acceleration/vibration and temperature utilizing a sensing element configured as a SAW device (e.g., SAW resonator or SAW delay line). The SAW device can be located in different locations on a substrate with respect to a thin piezoelectric diaphragm comprising an inertial mass. The temperature-compensated acceleration/vibration can be measured utilizing a frequency difference between an acceleration sensitive SAW resonator (e.g., SAW-g) and a temperature sensitive SAW resonator (e.g., SAW-T). The temperature can be measured utilizing a frequency shift provided by the SAW-T and a temperature reference SAW resonator (e.g., SAW-R). Similarly, the phase response of different reflectors of the SAW delay line can be utilized to differentially measure the acceleration/vibration and temperature.
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申请公布号 |
US2010158071(A1) |
申请公布日期 |
2010.06.24 |
申请号 |
US20090353069 |
申请日期 |
2009.01.13 |
申请人 |
HONEYWELL INTERNATIONAL INC. |
发明人 |
COBIANU CORNEL;PAVELESCU IOAN;GOLOGANU MIHAL |
分类号 |
G01H13/00;G01K5/58;G01P15/09 |
主分类号 |
G01H13/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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