AN APPARATUS FOR HETERO-ION BEAM IRRADIATION USING MULTI-SLIT AND THE METHOD THEREOF

摘要

PURPOSE: An apparatus and a method for radiating heterogeneous ion beams are provided to radiate heterogeneous ion beams to the same position of a target sample by installing a multi slit on the rear of a mass separation electromagnet. CONSTITUTION: A mass separation electromagnet(210) is connected to one side of an ion source and separates an ion beam from the ion source into a plurality of ion beams with different orbit radius according to the kind of ions. A multi slit(220) is formed on the rear of a mass separation electromagnet and comprises a plurality of openings. The multi slit selectively transmits a specific kind of ion beams among the plurality of ion beams. An acceleration tube accelerates the ion beams which passes through the multi slit. A sample support(240) mounts the target sample to which the accelerated ion beam through the acceleration tube is radiated.