发明名称 WIRE SAW MACHINE SYSTEM
摘要 PURPOSE: A wire sawing system is provided to rapidly discharge slurry by preventing a pipe conduit from clogging due to remained slurry. CONSTITUTION: A wire sawing device cuts an object using a wire and slurry. The slurry is contained in a supply tank(10). A circulation pipe(20) circulates the slurry in the supply tank. A supply pipe(30) connects the circulation pipe and the wire sawing device. A plurality of valves(40) opens and closes the supply pipe. A capturing tank(50) is arranged in the lower part of the wire sawing device.
申请公布号 KR20100068583(A) 申请公布日期 2010.06.24
申请号 KR20080126986 申请日期 2008.12.15
申请人 SILTRON INC. 发明人 LEE, KYONG MOO;KIM, JEONG MIN;IKEDA MITSUHIRO
分类号 H01L21/301;H01L21/302;H01L21/304 主分类号 H01L21/301
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