发明名称 |
WIRE SAW MACHINE SYSTEM |
摘要 |
PURPOSE: A wire sawing system is provided to rapidly discharge slurry by preventing a pipe conduit from clogging due to remained slurry. CONSTITUTION: A wire sawing device cuts an object using a wire and slurry. The slurry is contained in a supply tank(10). A circulation pipe(20) circulates the slurry in the supply tank. A supply pipe(30) connects the circulation pipe and the wire sawing device. A plurality of valves(40) opens and closes the supply pipe. A capturing tank(50) is arranged in the lower part of the wire sawing device.
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申请公布号 |
KR20100068583(A) |
申请公布日期 |
2010.06.24 |
申请号 |
KR20080126986 |
申请日期 |
2008.12.15 |
申请人 |
SILTRON INC. |
发明人 |
LEE, KYONG MOO;KIM, JEONG MIN;IKEDA MITSUHIRO |
分类号 |
H01L21/301;H01L21/302;H01L21/304 |
主分类号 |
H01L21/301 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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