发明名称 PRESSURE SENSOR
摘要 PROBLEM TO BE SOLVED: To provide a pressure sensor suitably used in a surface acoustic wave element array capable of precisely detecting an environmental change distribution over a wide range and flexibly coping with a shape change of an applied surface over a wide range with a simple configuration at low production cost. SOLUTION: A pressure sensor 12a includes: a base member 16 equipped with a piezoelectric surface acoustic wave propagation surface 14 including an annular curved surface, which is a part of the surface of a sphere; and a surface acoustic wave excitation conversion mean 18a formed in contact with a propagating surface and converting received surface acoustic waves exited and propagated along the propagating surface to an electronic signal. The propagating surface has an object contact part T. The pressure sensor 12a is provided with a pressure detection means 24 for reducing the amplitude of the surface acoustic waves propagating along the propagating surface with an increase of the contact pressure by an object to the contact part, and detecting the magnitude of the contact pressure from a converted electric signal from the surface acoustic waves received by the conversion means based on a change of the propagation state of the surface acoustic waves with a reduction in the propagation state. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010139506(A) 申请公布日期 2010.06.24
申请号 JP20100005298 申请日期 2010.01.13
申请人 TOPPAN PRINTING CO LTD;BALL SEMCONDUCTOR INC 发明人 NAKASO NOBUTAKA;TAKEDA NOBUO;ESASHI MASAKI
分类号 G01L1/00;G01L5/00;H01L41/08;H01L41/09;H01L41/18 主分类号 G01L1/00
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