| 发明名称 |
METHOD AND INSTALLATION FOR EXPOSING THE SURFACE OF AN INTEGRATED CIRCUIT |
| 摘要 |
The invention relates to a method for exposing an integrated circuit by ablating the polymer coating initially covering the integrated circuit, characterised in that it comprises the combined application of a laser radiation and a plasma onto the coating initially covering the integrated circuit. |
| 申请公布号 |
US2010154558(A1) |
申请公布日期 |
2010.06.24 |
| 申请号 |
US20070521444 |
申请日期 |
2007.12.12 |
| 申请人 |
CENTRE NATIONAL D'ETUDES SPATIALES |
发明人 |
DESPLATS ROMAIN;OBEIN MICHAEL |
| 分类号 |
G01N3/24;B23K26/00;H01L21/3065 |
主分类号 |
G01N3/24 |
| 代理机构 |
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| 主权项 |
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| 地址 |
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