| 摘要 |
The present invention enables a movable body to be moved without generating pitching. X-axis drive parts, which have: X-axis shafts formed by disposing a plurality of magnets along an X-axis direction and connected to a pair of Y-axis movers; and X-axis movers constituted by coils surrounding the X-axis shafts, are respectively arranged on both outer sides of an X-axis movable body, thereby making it possible to adjust the position of the X-axis movable body in the vertical direction. Then, lowering the position of the X-axis movable body in the vertical direction brings the center of gravity location of the X-axis movable body in the vertical direction in proximity to the X-axis shafts and Y-axis drive parts having Y-axis movers. Consequently, the X-axis movable body is stabilized and supported by the X-axis drive parts.
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