摘要 |
The invention relates to a process of preparing functional layers, like protection, encpasulation and alignment layers, on an electronic device by a low energy particle beam deposition process, to functional layers obtainable by said process, and to electronic devices comprising such functional layers. |
申请人 |
MERCK PATENT GMBH;COELLE, MICHAEL;PARRI, OWAIN, LLYR;SPARROWE, DAVID;YAROSHCHUK, OLEG |
发明人 |
COELLE, MICHAEL;PARRI, OWAIN, LLYR;SPARROWE, DAVID;YAROSHCHUK, OLEG |