发明名称 |
SYSTEM AND PROCESSING OF A SUBSTRATE |
摘要 |
A system for processing a substrate comprising a loading station for receiving the substrate; a bottom surface inspection station for inspecting the bottom surface of the substrate; a top surface inspection station for inspecting the top surface of the substrate and; a sorting station for sorting the substrate into a predetermined category based upon the bottom surface inspection and top surface inspection. |
申请公布号 |
WO2010071609(A2) |
申请公布日期 |
2010.06.24 |
申请号 |
WO2009SG00484 |
申请日期 |
2009.12.17 |
申请人 |
ROKKO VENTURES PTE LTD;YANG, HAE, CHOON |
发明人 |
YANG, HAE, CHOON |
分类号 |
H01L21/66 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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