发明名称 INDIUM OXIDE SINTERED COMPACT AND SPUTTERING TARGET
摘要 <p>A sintered compact consisting of indium oxide crystals and oxides of aluminum and/or scandium which are solid-soluted in the indium oxide crystals, wherein the atomic ratio of the total of aluminum and scandium to the total of aluminum, scandium, and In is 0.001% above but below 45% as calculated according to the formula: (the total of aluminum and scandium)/(the total of aluminum, scandium, and In) × 100.</p>
申请公布号 WO2010070944(A1) 申请公布日期 2010.06.24
申请号 WO2009JP59954 申请日期 2009.06.01
申请人 KAWASHIMA, HIROKAZU;IDEMITSU KOSAN CO.,LTD.;INOUE, KAZUYOSHI;UTSUNO, FUTOSHI;YANO, KOKI;TOMAI, SHIGEKAZU;KASAMI, MASASHI;TERAI, KOUTA 发明人 INOUE, KAZUYOSHI;UTSUNO, FUTOSHI;KAWASHIMA, HIROKAZU;YANO, KOKI;TOMAI, SHIGEKAZU;KASAMI, MASASHI;TERAI, KOUTA
分类号 C04B35/00;C23C14/34 主分类号 C04B35/00
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