| 摘要 |
PROBLEM TO BE SOLVED: To solve problems of leak, clogging, etc., caused by adhesion of exhaust gas components to a valve by not installing the valve to an exhaust pipe for exhausting gas generated from a treated object; to prevent increase in flow resistance, pressure loss, etc., accompanying the adhesion of the exhaust gas components to an inner surface of the exhaust pipe, etc. SOLUTION: The heat treatment device 10 includes a heating furnace 12 for heat-treating an object to be treated, the exhaust pipe 15 connected to the heating furnace 12 for exhausting the gas generated in the heating furnace 12, an ejector 17 provided in the exhaust pipe 15, a driving gas supply means 18 for supplying driving gas to the ejector, a mass flow controller 26 for adjusting flow rate of the driving gas, and a heating means 19 for heating the driving gas supplied to the ejector 17. COPYRIGHT: (C)2010,JPO&INPIT |
