| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of shortening an adjustment time when stage temperature within a vacuum chamber is adjusted. Ž<P>SOLUTION: High-boiling-point oil is filled in a space 4 within a stage and replaced with oil of suitable temperature and the same quality when the temperature is raised or lowered to improve response. When the stage 1 is cooled, inside cycloparaffin having been heated is discharged from "A" and oil subjected to room-temperature control is injected from B. Consequently, a heated electric heater 2 is rapidly cooled. Further, the oil replacement is performed several times to achieve more rapid temperature control. Further, the replacement is continuously performed to obtain higher cooling effect. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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