| 摘要 |
A method for manufacturing a reservoir capacitor of a semiconductor device reduces the resistance of the reservoir capacitor to secure reliability of the semiconductor device. The method comprises: forming a dummy pattern having a lattice structure over a transistor; forming a first interlayer insulating film over the resulting structure including the dummy pattern; etching the first interlayer insulating film to form a line-structured storage node contact region between the lattice structures; and filling a conductive layer in the line-structured storage node contact region to form a line-structured storage node contact.
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