| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a light-emitting device that emits an outgoing light upward by which an anti-reflective coating can be formed by a, simple process. <P>SOLUTION: The method for manufacturing the light-emitting device 100, which includes an active layer 106 sandwiched between a first clad layer 104 and a second clad layer 108, reflects light generated in the active layer 106 by side surfaces 106a and 106b of the active layer 106 and outputs it upward, and the device 100 includes: a process for forming the first clad layer 104, the active layer 106, the second clad layer 108 and the anti-reflective coating 118 on a substrate 102 in sequence by an epitaxial growth method; a process for forming light output parts by patterning the anti-reflective coating 118; and a process of inclining at least the side surfaces 106a and 106b of the active layer 106 by 45 degrees, with respect to the vertical direction by etching the active layer 106. <P>COPYRIGHT: (C)2010,JPO&INPIT |
