发明名称 LUMINOUS FLUX-SPLITTING ELEMENT, ILLUMINATION OPTICAL SYSTEM, EXPOSURE DEVICE, AND DEVICE MANUFACTURING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide an illumination optical system capable of stably actualizing a variety of lighting conditions using a pair of spatial optical modulators while securing relatively simple and compact constitution. <P>SOLUTION: The illumination optical system includes a luminous flux-splitting element (2) configured to split incident luminous flux into two pieces of luminous flux and emit them. The luminous flux-splitting element has: a plurality of first incident-side deflecting surfaces (21a) provided in a first incident region (IR1) in an incident region (IR); and a plurality of second incident-side deflecting surfaces (21b) provided in a second incident region (IR2). Further, the luminous flux-splitting element has: a plurality of first emission-side deflecting surfaces (22a), provided in a first emission region (ER1) corresponding to the first incident region, corresponding to the plurality of first incident-side deflecting surfaces; and a plurality of second emission-side deflecting surfaces (22b), provided in a second emission region (ER2) corresponding to the second incident region, corresponding to the plurality of second incident-side deflecting surfaces. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010141151(A) 申请公布日期 2010.06.24
申请号 JP20080316410 申请日期 2008.12.12
申请人 NIKON CORP 发明人 TANITSU OSAMU
分类号 H01L21/027;G02B5/00;G02B5/04;G03F7/20 主分类号 H01L21/027
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