POLARIZATION CONTROL UNIT, LIGHTING OPTICAL SYSTEM, EXPOSURE DEVICE, AND DEVICE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a polarization control unit capable of converting incident light into light having a desired polarization degree and emitting it.

SOLUTION: The polarization control unit (2) includes a first depolarizer (22b) having an optical axis crossing an optical axis (AX), a second depolarizer (22b) disposed on a projection side of the first depolarizer and having an optical axis crossing the optical axis, and a 1/2-wavelength plate (24) rotatable on the optical axis. At least one of the first depolarizer and second depolarizer is rotatably configured for changing angles of rotation on the optical axis of the first depolarizer and the optical axis of the second depolarizer.

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