| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas sensor using oxide semiconductor nano-fibers applied with a nano-sized metal oxide or metal catalyst particles which are ultrasensitive to a specific gas. SOLUTION: The gas sensor includes: an insulating substrate; a metal electrode formed on the insulating substrate; and an oxide semiconductor nano-fiber layer formed on the metal electrode and applied with highly sensitive nanoparticles. The gas sensor using oxide semiconductor nano-fibers can be produced by preparing an oxide in a solution for electric radiation, forming oxide semiconductor nano-fibers by subjecting the solution to electric radiation and thermal treatment; and partially applying a nano-sized metal oxide or metal catalyst particles which are highly sensitive to a specific gas, to the surface of the nano-fibers having a large specific surface area. The gas sensor using oxide semiconductor nano-fibers has high sensitivity, high selectivity, high responsiveness, and long term stability. COPYRIGHT: (C)2010,JPO&INPIT
|
