MICRO-THERMISTOR GAS PRESSURE SENSOR

摘要

The invention provides an apparatus and method for precisely measuring gas pressure over a large dynamic range and with good immunity to temperature fluctuations, encompassing applications such as gas sensing, bolometer imaging and industrial process monitoring. The micro-thermistor gas pressure sensor assembly consists of a suspended platform micro-thermistor sensor device exposed to the gas pressure of a given atmospheric environment, an electrical readout circuit connected to the suspended platform micro-thermistor sensor device, wherein the suspended platform micro-thermistor sensor device acts as a variable electrical resistance in said readout electrical circuit, a binary-wave voltage source connected to the suspended platform micro-thermistor sensor device, and an ohmmeter.