INTEGRATED ROLL-TO-ROLL SPUTTER CHAMBER

摘要

The present invention provides an integrated roll-to-roll sputter chamber which comprises: a first chamber for performing a pretreatment process that removes foreign materials attached to a film of a substrate; and a second chamber for depositing a material on the film. The films of the first and second chambers are respectively and continuously transferred to working regions of the first and second chambers by first and second roller systems. The first chamber is attached to the second chamber through a partition that faces the second chamber and forms a boundary. The integrated roll-to-roll sputter chamber of the present invention can be manufactured, maintained, and repaired at a low cost compared with a conventional chamber. Additionally, the invention enables effective use of work area by reducing the size of the chambers. Also, two detachable rollers for rewinding and unwinding are installed at a height of 1m-1.5m from the floor surface, so subsequent processes can be quickly performed by enabling direct work during maintenance and repair work without existing cranes.