PIEZOELECTRIC MICROSPEAKER AND METHOD OF MANUFACTURING THE SAME

摘要

PURPOSE: A piezoelectric micro speaker and a manufacturing method thereof are provided to get a uniform thickness of a membrane by forming a diaphragm thin film into a uniform thickness. CONSTITUTION: A diaphragm thin film(110) is formed in the lower surface of a piezoelectric element(120). The diaphragm thin film is vibrated with the driving operation of the piezoelectric element. The diaphragm thin film generates a sound through the vibrations. The diaphragm thin film is supported with a substrate(100). The substrate comprises a bottom material layer(101), an etch stop layer(102), and a top material layer(103) which are sequentially formed. The substrate supports the edge of the vibrator of the diaphragm thin film. The etch stop layer is formed into a material which has the etch selectivity about the bottom and top material layer.