发明名称 |
A POSITIVE PHOTORESIST COMPOSITION |
摘要 |
PURPOSE: A positive photoresist composition is provided to obtain excellent heat resistance and improved residual film rate and to be used for a process of manufacturing a semiconductor and a liquid crystal display device. CONSTITUTION: A positive photoresist composition comprises; 10 ~ 25 weight% of an alkali-soluble resin; 1 ~ 10 weight% of a dissolution inhibitor; 0.01 ~ 10 weight% of an additive including a diisocyanate compound which is marked as a chemical formula 1; and a solvent. In the chemical formula 1, R is an aromatic compound having a carbon number of 6 ~ 24 and an aliphatic compound having a carbon number of 1 ~ 12. The compound, which is marked as the chemical formula 1, is toluene 2,4-diisocyanate(TDI) which is marked as a chemical formula 2. |
申请公布号 |
KR20100069304(A) |
申请公布日期 |
2010.06.24 |
申请号 |
KR20080127955 |
申请日期 |
2008.12.16 |
申请人 |
DONGWOO FINE-CHEM CO., LTD. |
发明人 |
LEE, EUN SANG;CHANG, WON YOUNG;KIM, JONG HWAN |
分类号 |
G03F7/039 |
主分类号 |
G03F7/039 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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