| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning method which is under a low environmental load and has a higher cleaning power, a cleaning unit performing the method, and a cleaning apparatus incorporating the cleaning unit. SOLUTION: In the cleaning method, microbubbles are generated in electrolytic alkaline water as a cleaning solution, and the solution is intermittently irradiated with ultrasonic wave therein. The cleaning unit includes a cleaning tank (102) storing the electrolytic alkaline water as the cleaning solution, a microbubble generating nozzle (103) generating the microbubbles in the cleaning tank (102), and an ultrasonic oscillator irradiating the electrolytic alkaline water stored in the cleaning tank (102) with the ultrasonic wave therein. The cleaning apparatus includes a cleaning unit cleaning the cleaning object, a rinse unit removing the cleaning solution attached to the cleaning object, and a drying unit dewatering and drying the cleaning object, wherein the above cleaning units is used as the cleaning unit. COPYRIGHT: (C)2010,JPO&INPIT
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