| 摘要 |
PROBLEM TO BE SOLVED: To provide a circuit pattern inspection device capable of using inspection signals having the same frequency when detecting short-circuiting between conductive patterns. SOLUTION: Two inspection signals S1, S2 having the same frequency, the same waveform, and inverted phases are applied to the two adjacent conductive patterns 2a, 2b, respectively, and a sensor section 4 is moved without any contact at upper portions of the conductive patterns 2a, 2b to detect each inspection signal by a detection section 5. Closer to a place where the sensor section 4 has been short-circuited, the applied inspection signals are canceled each other, and the detection values sharply decrease, thus finding a short-circuited position 100. COPYRIGHT: (C)2010,JPO&INPIT |
